A novel 6 × 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications
Frontiers | A Review of UltraHigh Frequency Ultrasonic Transducers
Ultrasound transducer technology platforms | imec
MEMS ultrasonic transducers for safe, low-power and portable eye-blinking monitoring | Microsystems & Nanoengineering
Development of high‐frequency‐type MEMS ultrasonic array sensor using P(VDF/TrFE) thin films - Tanaka - 2019 - Electronics and Communications in Japan - Wiley Online Library
MEMS Sensors: TDK announces worldwide availability of MEMS-based “sonar on a silicon chip” ultrasonic time-of-flight sensors | Press Releases | News Center |TDK GLOBAL
MEMS ultrasonic transducers made by Fraunhofer for the production technology