The CH-101 has a MEMS ultrasound transducer and a CMOS mixed-signal... | Download Scientific Diagram
PDF] Design and Simulation of a MEMS-Based Capacitive Micro-Machined Ultrasonic Transducer for Viscosity Sensing Applications | Semantic Scholar
Development of high‐frequency‐type MEMS ultrasonic array sensor using P(VDF/TrFE) thin films - Tanaka - 2019 - Electronics and Communications in Japan - Wiley Online Library
MEMS-based ultrasonic transducer as the receiver for wireless power supply of the implantable microdevices - ScienceDirect
MEMS ultrasonic transducers for biomedical applications - ScienceDirect
MEMS Sensors: TDK introduces two new high-performance ultrasonic ToF sensors | TDK